Advancing the frontier of non-equilibrium plasma enabled semiconductor manufacturing: laser-spectroscopy measurements of non-equilibrium molecular pla

Advancing the frontier of non-equilibrium plasma enabled semiconductor manufacturing: laser-spectroscopy measurements of non-equilibrium molecular plasmas:-

Semiconductor technologies are foundational to our experience of the modern world, enabling computers, mobile phones and cutting-edge medical breakthroughs.

Our overarching objective is to increase our understanding of the foundational plasma physics and chemistry that underpins plasma-enabled fabrication of semiconductor devices. We will draw upon advanced optical techniques, for example laser spectroscopy, to measure reactive species in the plasma in industry relevant operating conditions.

The project is jointly supervised by the University of York and Oxford Instruments Plasma Technology and falls within the remit of UKR's research themes Physical Sciences and Manufacturing the Future.