Manual Probe Station

NIST-SS26-166

Title: Sources Sought Notice for Manual Probe Station

BACKGROUND

The National Institute of Standards and Technology (NIST) requires a manual probe system with reliable, accurate positioners for tabletop electronic measurements through direct probing of samples. The system shall provide precise motion control for single probe micropositioners, allowing stable electrical contact to small device features such as lithography defined bonding pads. It will be used to screen devices and diagnose possible leakage paths, shorts, or contact issues by room temperature DC measurements before committing time and resources to more advanced measurements. It will also be used to do room temperature RF measurements for testing fabricated RF resonators. the probing precision, DC and RF measurement capability required for our applications.

The National Institute of Standards and Technology (NIST) Material Measurement Laboratory (MML) has a requirement for a Probe Station and is seeking information from sources that may be capable of providing a solution that will achieve the specifications described below:

Description: 200 mm Manual Probe Station with both DC and RF capable micropositioners Quantity: One (1)

Technical specifications.

The system shall have the following components:

a platen where micropositioners sit
an optical microscope
a camera for the microscope
a RF capable chuck to hold the test sample
QTY(4) four micropositioners with probes for DC measurement
QTY(2) two micropositioners with probes for RF measurement.

The probe station shall be designed for RF, DC, and high-power testing applications and shall support multiple probe configurations on a common platen. The platen shall be at least 400 mm x 600 mm in size and support at least a configuration of 2 RF + 4 DC probes.
The system shall come with a vacuum sample chuck with capability to accommodate sample sizes greater than or equal to 200 mm.
The chuck shall provide vacuum holding capability...